Microelectronics Technology Helps Rapid Development of Sensor Technology

For decades, microelectronics technology has promoted the development of sensor technology. Therefore, the entire industry must establish a sense of innovation, vigorously strengthen the development of new sensors, improve the cost-effectiveness of products, accelerate the transformation of scientific research results, accelerate the industrialization of new sensors, and rapidly increase the market share of domestic sensors.

At present, China's sensor industry is relatively small and has a narrow application range. For this reason, we need to change our minds and transform the development of sensors from the development of single physical sensors to the development of highly integrated new sensors. The development and application of new sensors has become the core and key of modern systems, and it will become a new economic growth point for the 21st century information industry. There are nearly 6000 kinds of specifications.

China began to engage in sensor manufacturing as early as the 1960s. China established and established China's first batch of piezoresistive sensor development and production units in 1972; in 1974, China successfully developed China's first practical piezoresistive pressure sensor; in 1978, China's first solid-state piezoresistive acceleration sensor was born; in 1982, The earliest domestic research began on silicon micro-machined system (MEMS) processing technology and SOI (silicon on insulator) technology.

After entering the 1990s, absolute pressure sensors, micro-pressure sensors, ventilator pressure sensors, polysilicon pressure sensors, and low-cost TO-8 packaged pressure sensors for silicon micromachining were introduced and realized in production.

Since the reform and opening up 30 years ago, China's sensor technology and its industries have made considerable progress, mainly in the establishment of a national key laboratory of sensing technology, micro/nano national key laboratory, national sensor technology engineering center and other research and development base; MEMS , MOEMS (Micro-Electro-Mechanical-Electro-Mechanical Systems) and other research projects have been included in the national high-tech development priorities; in the “Ninth Five-Year Plan” national key scientific and technological projects, the sensor technology research has achieved 51 varieties of 86 specifications of new products, initially established Sensitive components and sensors industry; In 2007, the total output of the sensor industry reached 2.093 billion, and there were almost 6,000 species and specifications, and it has been applied in various sectors of the national economy and national defense construction.

In the late 1980s, China listed sensors as the focus of national high-tech development. After the “Eighth Five-Year Plan”, “Ninth Five-Year Plan”, and “Tenth Five-Year Plan” research and industrialization, there are currently more than 2,000 enterprises and institutions in the country. The unit is engaged in the development, production and application of sensors. Due to the economic development level and the limitation of production R&D funds, the overall technical level of China's sensor industry is still relatively backward, with smaller scale and application areas. Today, active in the international market is still the enterprises of old industrial countries such as Germany, Japan, the United States, and Russia. In these countries, the application of sensors is very wide. Many manufacturers have achieved large-scale production. Some companies have annual production capacity of tens or even hundreds of millions. In contrast, the application range of China's sensors is narrow, and more applications still remain in basic application areas such as industrial measurement and control.

Microelectronics Drive Sensor Development For decades, microelectronics technology has promoted the development of sensor technology. In the next 10 to 20 years, traditional silicon technology will enter a mature period (estimated from 2014 to 2017). Looking at the overall development, the traditional silicon technology market will continue until 2047 (ie, the 100th anniversary of transistor invention) before it tends to saturate (ie, reach the limit of the chip feature size) and decline. The current microelectronics technology will continue to follow the two basic laws of “equal ratio principle” and “Moore’s Law”. In approaching the limits of traditional silicon technology, the cross-disciplinary horizontal applications of silicon (such as MEMS, etc.) and the more advanced silicon are continuously expanded. Applications (quantum, molecular devices). The two major development directions of the above microelectronics technology are the major development directions of sensor technology in the current and even the next 20 years.

At present, the sensor industry presents eight development trends, namely, the industrialization development model of sensors, comprehensive, coordinated and continuous development of sensor products, the scale of production (annual production capacity), the development of economies of scale, the development of production patterns in the direction of specialization, and the production of sensors. The development of technology in the direction of automation, the transformation of key technologies of enterprises should shift from the digestion and absorption of imported technologies and the direction of independent innovation, and the acceleration of the development of enterprises from the domestic market to the domestic and foreign markets combined with the development of the international market. We will develop the pattern of "co-existence of large, medium, and small", "grouping, and specialized production."

Therefore, the entire industry must establish a sense of innovation, vigorously strengthen the development of new sensors, improve the cost-effectiveness of products, accelerate the transformation of scientific research results, accelerate the industrialization of new sensors, rapidly increase the market share of domestic sensors, and narrow the gap with developed countries. At the same time, we must also consider taking the United Way, attracting foreign advanced technology and technology, and strengthen our own scientific and technological strength.

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